English  |  正體中文  |  简体中文  |  Items with full text/Total items : 28603/40634
Visitors : 4439212      Online Users : 586
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search
LoginUploadHelpAboutAdminister

Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/53825

Title: 利用電漿蝕刻製作週期性銀奈米柱陣列進行環境折射率感測之研究
Fabrication of Periodic Silver Nanorod Arrays by Plasma Etching for Refractive Index Sensing
Authors: Chen, Kuan-Hung
陳冠鴻
Contributors: NTOU:Institute of Optoelectronic Sciences
國立臺灣海洋大學:光電科學研究所
Keywords: 表面電漿;奈米球微影術;奈米柱陣列;環境折射率 感測
Surface Plasmonic;Nanosphere lithography;Nanopillars;Refractive Index Sensing
Date: 2019
Issue Date: 2020-07-03T08:47:59Z
Abstract: 本論文實驗主要製作週期性實心奈米柱陣列,並針對於其製程方面以及光學吸收(Absorption)量測部分進行相關研究。 實驗使用自組裝奈米球微影術(Self-Assembled Nanosphere Lithography, NSL)與反應離子蝕刻(Reactive Ion Etching, RIE)配合感應耦合電漿反應離子蝕刻(Inductively Coupled Plasma-Reactive Ion Etching, ICP-RIE)在矽基板鋪上奈米球後蝕刻製作出週期性陣列的奈米柱,過程使用掃描式電子顯微鏡(Scanning Electron Microscope, SEM)詳細紀錄每個實驗步驟及實驗樣品的表面以及剖面結構。並進行量測及觀察實驗結果。 奈米柱製作完成後,先使用Comsol模擬軟體進行銀奈米柱的吸收光譜以及電場分布等分析;而在量測結果方面,使用熱蒸鍍鍍上30nm厚度的銀(Ag),再浸泡在不同環境折射率的匹配液中(Reflective Index Liquid),最後使用反射式光譜儀(Reflective Spectrometer, RS)對樣品量測其光學吸收波長,進而探討金屬以及介電材料的實心奈米柱陣列對於表面電漿(Surface Plasmon, SP)與環境折射率感測所帶來的影響。 最後從量測及模擬中可以觀察到吸收光譜內的λres隨著周圍環境RI增加有明顯的紅移,量測靈敏度約在300nm/RIU。 關鍵字:表面電漿、奈米球微影術、奈米柱陣列、環境折射率感測
In this paper, periodic solid nano-pillar arrays have been fabricated and the related fabrication processes and the measurement of absorption spectrum were investigated. Self-assembled nano-sphere Lithography (NSL) followed by Reactive Ion Etching (RIE) with Inductively Coupled Plasma-Reactive Ion Etching (ICP-RIE) has been conducted in experiment. After the nanospheres were assembled on the silicon substrate, the samples were etched and then the periodic nano-pillar arrays were fabricated. In each experimental step, the surface and the cross-sectional view of the structure were recorded in detail by Scanning Electron Microscope (SEM). Afterwards, the measurements were conducted and then experimental results were analyzed. After the fabrication of the nano-pillars, the absorption spectrum and electric field distribution of the silver nano-pillars are analyzed using the Comsol simulation software. Silver (Ag) with a thickness of 30 nm was deposited by thermal evaporation, and then the sample was immersed in different reflective index liquids and followed by the absorption spectrum of the sample measured by Reflective Spectrometer (RS). The influences of the solid nano-pillar arrays of metal and dielectric material on Surface Plasmon(SP) and environmental refractive index sensing were investigated. Finally, according to the experiment and simulation, it can be observed that the λres in the absorption spectrum has a significant red shift with the increase of the surrounding environment RI, and the experiment sensitivity is about 300nm/RIU. Keywords: Surface Plasmonic, Nanosphere lithography, Nanopillars, Refractive Index Sensing
URI: http://ethesys.lib.ntou.edu.tw/cgi-bin/gs32/gsweb.cgi?o=dstdcdr&s=G0010688002.id
http://ntour.ntou.edu.tw:8080/ir/handle/987654321/53825
Appears in Collections:[光電科學研究所] 博碩士論文

Files in This Item:

File SizeFormat
index.html0KbHTML1View/Open


All items in NTOUR are protected by copyright, with all rights reserved.

 


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback