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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51820

Title: ITO patterning by a low power Q-switched green laser and its use in the fabrication of a transparent flow meter
Authors: Ji-Yen Cheng
Meng-Hua Yen
Wen-Chi Hsu
Jia-Hau Jhang
Tai-Horng Young
Contributors: 國立臺灣海洋大學:機械與機電工程學系
Date: 2007
Issue Date: 2018-12-25T07:33:19Z
Publisher: Journal of Micromechanics and Microengineering
Abstract: Abstract: A new ITO patterning method is reported and then applied for fabricating a transparent gas flow meter. Laser-induced backside wet etching using a low power green laser (visible-LIBWE) was used for direct-write ITO patterning. The obtained ablation result shows a smoother surface and less debris than that obtained from front-side laser ablation. Surface quality was examined by SEM, energy dispersive spectroscopy, electron spectroscopy for chemical analysis and surface profiler, and was compared to the etching result by UV and IR lasers. Electrical isolation was obtained using this new ITO ablation method. The method was then utilized in fabricating a transparent gas flow meter. The gas flow was measured by monitoring the resistance change of ITO micro strips by a multimeter. The flow meter's detection limit was estimated to be 0.24 ml min−1 and its response time was 2.6 s.
Relation: 17(11)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51820
Appears in Collections:[機械與機電工程學系] 期刊論文

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