English  |  正體中文  |  简体中文  |  Items with full text/Total items : 26988/38789
Visitors : 2347978      Online Users : 29
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search
LoginUploadHelpAboutAdminister

Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51820

Title: ITO patterning by a low power Q-switched green laser and its use in the fabrication of a transparent flow meter
Authors: Ji-Yen Cheng
Meng-Hua Yen
Wen-Chi Hsu
Jia-Hau Jhang
Tai-Horng Young
Contributors: 國立臺灣海洋大學:機械與機電工程學系
Date: 2007
Issue Date: 2018-12-25T07:33:19Z
Publisher: Journal of Micromechanics and Microengineering
Abstract: Abstract: A new ITO patterning method is reported and then applied for fabricating a transparent gas flow meter. Laser-induced backside wet etching using a low power green laser (visible-LIBWE) was used for direct-write ITO patterning. The obtained ablation result shows a smoother surface and less debris than that obtained from front-side laser ablation. Surface quality was examined by SEM, energy dispersive spectroscopy, electron spectroscopy for chemical analysis and surface profiler, and was compared to the etching result by UV and IR lasers. Electrical isolation was obtained using this new ITO ablation method. The method was then utilized in fabricating a transparent gas flow meter. The gas flow was measured by monitoring the resistance change of ITO micro strips by a multimeter. The flow meter's detection limit was estimated to be 0.24 ml min−1 and its response time was 2.6 s.
Relation: 17(11)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51820
Appears in Collections:[機械與機電工程學系] 期刊論文

Files in This Item:

File Description SizeFormat
index.html0KbHTML6View/Open


All items in NTOUR are protected by copyright, with all rights reserved.

 


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback