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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51781

Title: High-Quality Surface Micromachining on Polymer Using Visible-LIBWE
Authors: Ji-Yen Cheng
Wei-Chen Kao
Mansoureh Z. Mousavi
Hui-Fang Chang
Wen-Chi Hsu
Meng-Hua Yen
Martin Ehrhardt
Klaus Zimmer
Contributors: 國立臺灣海洋大學:機械與機電工程學系
Date: 2016-01
Issue Date: 2018-12-24T02:01:43Z
Publisher: JLMN-Journal of Laser Micro/Nanoengineering
Abstract: Abstract: This work describes optically smooth high quality surface machining on poly methyl methacry-late (PMMA) using simple visible-LIBWE (laser induced back-side wet etching using visible laser, v-LIBWE). Micromachining of polymer such as PMMA usually utilizes CO2 lasers. However, minimal feature smaller than 100 μm is difficult to achieve and that the surface quality is not good. Using ultra-violet (UV) laser direct ablation reduces the minimal feature to be below 20 μm but the surface roughness is also not satisfactory (several μm). Here we demonstrated that high surface quality etching on PMMA was achievable by v-LIBWE using low power nanosecond 532 nm laser. The etching threshold is ~50 J/cm², which corresponded to ~2 mW at 1 kHz repetition rate. Using pulse repetition rate of 1 kHz, trench depth saturated at about 2 μm. Deeper trench (~ 5 μm) is achievable using 30 kHz repetition rate but the process is not consistent and that discontinued trench was often observed. A perspective on the future development of v-LIEBWE on polymer substrate was given.
Relation: 11(1) pp.117-123
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51781
Appears in Collections:[機械與機電工程學系] 期刊論文

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