English  |  正體中文  |  简体中文  |  Items with full text/Total items : 28588/40619
Visitors : 4197673      Online Users : 45
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51776

Title: Towards fast nanopattern fabrication by local laser annealing of block copolymer (BCP) films
Authors: Klaus Zimmer
Joachim Zajadacz
Frank Frost, Andre Mayer
Christian Steinberg
Hella-Christin Scheer
Contributors: 國立臺灣海洋大學:機械與機電工程學系
Keywords: Laser
nano patterning
block copolymer
direct writing
Date: 2019-03
Issue Date: 2018-12-24T01:26:51Z
Publisher: Applied Surface Sciences
Abstract: Abstract: The nanopatterning of surfaces and thin films with pattern dimensions of less than 100 nm is challenging for laser processing in particular in the case of large-area, low-cost fabrication. Self-assembly processes, however, provide a mechanism of pattern generation in this dimensional range offering an alternative fabrication method. The current work focuses on high-temperature, short-time laser annealing of PS-b-PMMA block copolymer (PS-b-PMMA BCP: poly(styrene-block-methyl methacrylate)) films on fused silica samples to achieve self-assembly into vertical lamellas with periods of approximately 50 nm. BCP samples were irradiated with a focussed CO2-laser beam for studying the influence of the laser power PL and the scanning speed vs on the lamellae formation in BCP films. The formation of lamellae is observed in the centre of the laser track at sufficient laser irradiation (PL: 2 to 15 W, vs: 1 to 250 mms−1). With increasing laser irradiation, first the quality of the lamellas improves to a certain point but thereafter a partial degradation of the BCP and dewetting of the BCP film occurs. The partial degradation of the PMMA micro-phase of the ordered BCP results in a local self-developing process reducing the processing steps for nanopattern formation. The experimental results on laser-induced local self-assembly with irradiation times below 0.1 s are discussed in relation to laser-induced temperature field simulations. Combining self-assembly capabilities of BCP with local heating by laser beams can provide a tool for direct writing of hierarchical nano-/microscale patterns that is useful for various applications mimicking bio-inspired structures.
Relation: 470 pp.639-644
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51776
Appears in Collections:[機械與機電工程學系] 期刊論文

Files in This Item:

File Description SizeFormat

All items in NTOUR are protected by copyright, with all rights reserved.


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback