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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51771

Title: A High Sensitivity Lead-titanate (PbTiO3) Pyroelectric Thin-film Infrared Sensor with Temperature Isolation Improvement Structure
Authors: Jyh-Jier Ho
Y.K. Fang
K.H. Wu
W.T. Hsieh
C.W. Chu
C.R. Huang
M.S. Ju
C.P. Chang
Contributors: 國立臺灣海洋大學:電機工程學系
Keywords: Infrared sensors
Sensor systems
Thermal sensors
Thin film sensors
Isolation technology
Microelectromechanical systems
Structural beams
Radio frequency
Date: 1998-06
Issue Date: 2018-12-21T08:35:46Z
Publisher: IEEE Electron Device Letters
Abstract: Abstract: An infrared (IR) sensor with the lead-titanate (PbTiO 3 ) thin-film using the technology of micro-electromechanical system to achieve a better thermal isolation structure has been fabricated and developed, The major IR-sensing part on the cantilever beam with dimensions of 200×100×2 μm 3 consists of a 500 /spl Aring/ PbTiO 3 layer deposited by RF sputtering, and an evaporated bismuth (Bi) layer. This thermal isolation improved structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure on the experimental results, which show a 200% and 300% improvement in current gain under the incident optical power 500 μW and 6 V applied bias at room temperature and 77 K, respectively,.
Relation: 19(6) pp.189-191
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51771
Appears in Collections:[電機工程學系] 期刊論文

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