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题名: The Dynamic Response Analysis of a Pyroelectric Thin-film Infrared Sensor with Thermal Isolation Improvement Structure
作者: Jyh-Jier Ho
Y.K. Fang
W.J. Lee
F.Y. Chen
W.T. Hsieh
S.F. Ting
M.S. Ju
M.S. Ju
S.B. Huang
K.H. Wu
C.Y. Chen
贡献者: 國立臺灣海洋大學:電機工程學系
关键词: Lead materials/devices
日期: 1999-12
上传时间: 2018-12-21T08:05:43Z
出版者: IEEE Transactions on Electron Devices
摘要: Abstract: Both theoretical and experimental studies of the substrate effect on the thermal behavior of a PbTiO/sub 3/ infrared (IR) sensor have been reported. With active cantilever dimensions of 200/spl times/100/spl times/5 /spl mu/m/sup 3/ formed by etching processes, the pyroelectric micro-electro-mechanical system (pyro/MEMS) structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure under the 800-/spl mu/W incident optical light with wavelength of 970 nm. Two-order improvement in current responsivity is obtained for the pyro/MEMS structure. This shows the substrate effect on the performance of a pyro/MEMS IR sensor is very significant. A simple model has also been proposed to illustrate the substrate effect more comprehensively.
關聯: 46(12) pp.2289-2294
显示于类别:[電機工程學系] 期刊論文


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