English  |  正體中文  |  简体中文  |  Items with full text/Total items : 27533/39387
Visitors : 2541241      Online Users : 33
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51760

Title: Analysis of Substrate Effects on the Response of Pyroelectric Thin-film Infrared Sensors
Authors: J.-J. Ho
Y. K. Fang
W. J. Lee
F. Y. Chen
W. T. Hsieh
S. F. Ting
K. H. Lee
M. C. Hsieh
C. P. Chang
K. H. Wu
Contributors: 國立臺灣海洋大學:電機工程學系
Date: 2010-10-29
Issue Date: 2018-12-21T08:02:36Z
Publisher: Microscale Thermophysical Engineering
Abstract: Abstract: An infrared (IR) sensor with a lead titanate (PbTiO3) thin film using the technology of microelectromechanical systems (MEMS) has been designed, fabricated, and developed. Anisotropic wet etching of Si(111) orientation in ethylenediamine/pyrocatechol (EDP) solution is used to process a micromachined cantilever beam for better thermal isolation and the array form available. The major IR-sensing part on the cantilever beam consists of a 5-nm PbTiO3 layer deposited by RF sputtering, and a gold (Au) black layer evaporated as an IR radiation absorber, with the active cantilever dimensions of 200 x 100 x 5 mu m3 formed by the etching processes. The substrate effect on the performance of the IR sensor has been studied in both experimental and theoretical analysis. The cantilever structure exhibits much superior performance in both theory and experiment to that of a traditional IR-sensing bulk structure under incident radiation at a wavelength of 970 nm.
Relation: 3(4) pp.263-272
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51760
Appears in Collections:[電機工程學系] 期刊論文

Files in This Item:

File Description SizeFormat

All items in NTOUR are protected by copyright, with all rights reserved.


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback