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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51685

Title: Hydrogen Sensor with Pd Nanoparticles upon an Interfacial Layer with Oxygen
Authors: Chia-Hua Huang
Jung-Hui Tsai
Tzung-Min Tsai
Kuo-Yen Hsu
Wei-Chen Yang
Hsuan-Wei Huang
Wen-Shung Lour
Contributors: 國立臺灣海洋大學:電機工程學系
Date: 2010-06-18
Issue Date: 2018-12-18T03:02:19Z
Publisher: Applied Physics Express
Abstract: Abstract: GaN-based hydrogen sensors fabricated with a Pd–SiO2 mixture as-deposited and wet-etched were investigated. Scanning electron microscope (SEM), energy dispersive spectrometer (EDS), and secondary ion mass spectrometer (SIMS) methods were employed to study the mixtures as-deposited and wet-etched. The results show that Pd nanoparticles and an interfacial layer with oxygen were formed, which contribute to improved dissociation rate, diffusion rate, and storage capability. The sensor fabricated with the mixture wet-etched responds well to various hydrogen-containing gases and produces a barrier-height variation over 275 mV at 2.13 ppm H2/N2. Comparisons to the sensor with the mixture as-deposited also evidence that hydrogen atoms can possibly be trapped inside the mixture.
Relation: 3(7)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51685
Appears in Collections:[電機工程學系] 期刊論文

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