National Taiwan Ocean University Institutional Repository:Item 987654321/51582
English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 26988/38789
造访人次 : 2344361      在线人数 : 36
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜寻范围 进阶搜寻

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51582

题名: In-TFT-array-process micro defect inspection using nonlinear principal component analysis.
作者: Y. H. Liu
C. K. Wang
Y. Ting
C. S. Chen
J. S Hwang
贡献者: 國立臺灣海洋大學:光電科學研究所
关键词: TFT array process
automatic optical inspection
defect inspection
kernel principal component analysis
support vector machine
thin film transistor liquid crystal display
日期: 2009-10
上传时间: 2018-12-07T06:55:35Z
出版者: Int. J. Molecular Sciences
摘要: Abstract: Defect inspection plays a critical role in thin film transistor liquid crystal display (TFT-LCD) manufacture, and has received much attention in the field of automatic optical inspection (AOI). Previously, most focus was put on the problems of macro-scale Mura-defect detection in cell process, but it has recently been found that the defects which substantially influence the yield rate of LCD panels are actually those in the TFT array process, which is the first process in TFT-LCD manufacturing. Defect inspection in TFT array process is therefore considered a difficult task. This paper presents a novel inspection scheme based on kernel principal component analysis (KPCA) algorithm, which is a nonlinear version of the well-known PCA algorithm. The inspection scheme can not only detect the defects from the images captured from the surface of LCD panels, but also recognize the types of the detected defects automatically. Results, based on real images provided by a LCD manufacturer in Taiwan, indicate that the KPCA-based defect inspection scheme is able to achieve a defect detection rate of over 99% and a high defect classification rate of over 96% when the imbalanced support vector machine (ISVM) with 2-norm soft margin is employed as the classifier. More importantly, the inspection time is less than 1 s per input image.
關聯: 10(10) pp.4498-4514
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51582
显示于类别:[光電科學研究所] 期刊論文

文件中的档案:

档案 描述 大小格式浏览次数
index.html0KbHTML19检视/开启


在NTOUR中所有的数据项都受到原著作权保护.

 


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回馈