National Taiwan Ocean University Institutional Repository:Item 987654321/51549
English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 27320/39164
造访人次 : 2474469      在线人数 : 38
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜寻范围 进阶搜寻

jsp.display-item.identifier=請使用永久網址來引用或連結此文件: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51549

题名: Effect of Annealing on PbTiO3 Thin Film Quality Improvement,
作者: C. C. Chang
贡献者: 國立臺灣海洋大學:電機工程學系
关键词: Annealing
PbTiO3 thin film
Perovskite structure of thin films
日期: 1996-12
上传时间: 2018-12-06T08:25:02Z
出版者: Thin Solid Films
摘要: Abstract: The significant finding of this experiment was that annealing improves the quality of PbTiO3 thin film. Moreover, following a short period of annealing, a high-quality perovskite-type PbTiO3 thin film was constructed on a Pt/SiO2/Si (100) substrate at a depositing temperature of 350°C, and supports IC fabrication processes to produce PbTiO3 thin film devices. Under experimental conditions, the annealing process decreased the full width at half maximum (FWHM) of the perovskite phase (111) peak, bringing the 2θ closer to the standard 2θ of the PbTiO3 perovskite phase (111) peak defined by the Joint Committee on Powder Diffraction Standards (JCPDS). The experiment herein involved good quality perovskite-phase PbTiO3 thin film on a Pt/SiO2/Si substrate deposited at 350°C and exposure to 5.93 W/cm2 of RF power, which was then annealed at 700°C for 5 min and then allowed to return to room temperature for more than 15 min. The perovskite structure of the PbTiO3 thin film constructed under the above conditions reached an FWHM (111) peak of 0.259° and a grain size of 341 Å.
關聯: 311(1-2) pp.304-309
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51549
显示于类别:[電機工程學系] 期刊論文

文件中的档案:

档案 描述 大小格式浏览次数
index.html0KbHTML10检视/开启


在NTOUR中所有的数据项都受到原著作权保护.

 


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回馈