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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51477

Title: Scenario Normalization Techniques: In-line Stepper Coordinator Design by the Sequence Diagram and Production Rules
Authors: Sheng-Lueng Chung
MuDer Jeng
Contributors: 國立臺灣海洋大學:電機工程學系
Keywords: Automatic control
Manufacturing automation
Production
Robotics and automation
Semiconductor device manufacture
Control systems
Planarization
Communication system control
Tracking
Job shop scheduling
Date: 2004-09
Issue Date: 2018-11-30T07:09:09Z
Publisher: IEEE Robotics & Automation Magazine
Abstract: Abstract: In this paper, the scenario normalization technique is addressed, which is very useful in the context of generic equipment control, where an equipment-control system (ECS) is to control several pieces of equipment, possibly of different types. This paper begins with a background introduction to a photolithographic cell and the concept of generic equipment control adopted in semiconductor fabs. The concept of message modulation that translates in semantics context the sequence flows between the high-level ECS and the low-level equipment is presented. The main idea relies on the operational scenarios modeling by the sequence diagram; message translation based on semantics analysis; the derivation of production rules and the implementation of them on an event-triggering platform. Scenarios, thus obtained and presented to the high-level ECS by the coordinator, are then in compliance with the normalized scenario as required by the generic equipment controller. The significance of the proposed normalization techniques has the following implication: when different equipment are included in a cell operation, it is not necessary to rewrite control programs but to add relatively simpler transformation sequences enabling the use of the standard ECS function. From the control point of view, the controlled systems of stepper and track can be modeled as discrete event dynamic ones if operation coordination is considered.
Relation: 11(3) pp.14 - 21
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51477
Appears in Collections:[電機工程學系] 期刊論文

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