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Title: Oxidation resistance and mechanical properties of Ta–Al–N coatings
Authors: Yung-I Chen
Jun-Hsin Lin
Chau-Chang Chou
Contributors: 國立臺灣海洋大學:光電與材料科技學士學位學程(學系)
Keywords: Annealing
Mechanical properties
Date: 2016-10
Issue Date: 2018-11-23T07:26:00Z
Publisher: Surface and Coatings Technology
Abstract: Abstract: Ta–Al–N coatings were prepared using reactive magnetron cosputtering on silicon substrates. The coatings with a high Ta content exhibited a face-centered-cubic structure, whereas the coating with a high Al content exhibited a near-amorphous phase. To determine the oxidation resistance of the Ta–Al–N coatings, annealing treatments were conducted in air at 600–800 °C. Adding Al into a TaN structure increased the oxidation resistance to endure 8-h annealing at 600 °C. Moreover, the Ta35Al15N50 coating exhibited a superior oxidation resistance at 700 °C for 4 h. The material characteristics of the annealed Ta–Al–N coatings were examined through Auger electron spectroscopy and transmission electron microscopy and by using a nanoindentation tester.
Relation: 303(15) pp.41-47
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51361
Appears in Collections:[光電科學研究所] 期刊論文

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