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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51214

Title: Sub-wavelength GaN-based membrane high contrast grating reflectors
Authors: Tzeng Tsong Wu
Yu Cheng Syu
Shu Hsien Wu
Wei Ting Chen
Tien Chang Lu
Shing Chung Wang
Hai Pang Chiang
Din Ping Tsai
Contributors: 國立臺灣海洋大學: 光電與材料科技學士學位學程(學系)
Date: 2012-08
Issue Date: 2018-11-16T07:49:20Z
Publisher: Optics Express
Abstract: Abstract: The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region.
Relation: 20(18) pp.20551-20557
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51214
Appears in Collections:[光電科學研究所] 期刊論文

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