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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51167

Title: Modeling, Analysis, Simulation, Scheduling, and Control of Semiconductor Manufacturing Systems: A Petri Net Approach
Authors: MengChu Zhou
Mu Der Jeng
Contributors: 國立臺灣海洋大學電機工程學系
Keywords: Automation
discrete event systems
performance evaluation
Petri nets
qualitative analysis
quantitative analysis
semiconductor manufacturing
system modeling
Date: 1998-08
Issue Date: 2018-11-15T01:29:52Z
Publisher: IEEE Transactions on Semiconductor Manufacturing
Abstract: Abstract: This paper presents a Petri net approach to modeling,
analysis, simulation, scheduling, and control of semiconductor
manufacturing systems. These systems can be characterized
as discrete event systems that exhibit sequential, concurrent, and
conflicting relations among the events and operations. Their evolution
is dynamic over time. The system complexity is tremendous
owing to the complex semiconductor manufacturing processes
and test procedures. A formal approach such as Petri nets
enables one to describe such complex discrete event systems
precisely and thus allows one to perform both qualitative and
quantitative analysis, scheduling and discrete-event control of
them. This paper also serves as a tutorial paper. It briefly reviews
applications of Petri nets in semiconductor manufacturing
automation. It then introduces definitions and concepts of Petri
nets. It proceeds with a discussion of basic Petri net modules in
system modeling, a modeling method and a practical system’s
modeling example. Next, the paper presents their properties and
their implications in manufacturing systems, as well as their
analysis methods. Timed Petri nets are introduced for system
simulation, performance evaluation, and scheduling purposes. An
application-oriented case study is presented. Finally, the paper
concludes with the active research areas in applying Petri nets to
design of semiconductor manufacturing systems.
Relation: 11(3) pp.333-357
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51167
Appears in Collections:[電機工程學系] 期刊論文

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