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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51068

Title: Applying Regional Level-Set Formulation to Postsawing Four-Element LED Wafer Inspection
Authors: Chun-Hsi Li
Chuan-Yu Chang
MuDer Jeng
Contributors: 國立臺灣海洋大學電機工程學系
Keywords: LED wafer
level-set formulation
postsawing inspection
Date: 2011-11
Issue Date: 2018-11-09T01:53:17Z
Publisher: IEEE Transactions on Systems, Man, and Cybernetics – Part C
Abstract: Abstract: With level-set formulation, new contours can emerge during the evolution of contours. A defect inspection system that utilizes the evolution of zero-level contours for segmenting postsawing wafer is proposed in this study. The system utilizes a regional formulation, which improves the level-set segmentation in images with intensity inhomogeneity. An automatic threshold is used to set the initial contour to a contour near the die region. Fewer iterations are thus required to evolve the zero-level set to segment the wafer. Without the needs for filtering in advance, the inspection can be performed directly on the segmented results. The proposed approach outperforms other postsawing inspection methods in terms of accuracy.
Relation: 41(6) pp.842-853
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/51068
Appears in Collections:[電機工程學系] 期刊論文

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