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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/50276

Title: Study on diamond thin film deposited on graphite substrate by different pretreatment methods
Authors: Hung-Yin Tsai
C.-W. Wu
Y.-M. Lin
H.-C. Chang
Contributors: 國立臺灣海洋大學:機械與機電工程學系
Keywords: Nanocrystalline diamond (NCD)
Substrate pretreatments method
PEI Pretreatment
Date: 2012-08
Issue Date: 2018-09-28T05:42:36Z
Publisher: Journal of Ceramic Processing Research
Abstract: Abstract: Nanocrystalline diamond thin film has been deposited on a graphite substrate by hot filament chemical vapor deposition
system. The characteristics of diamond thin film growth on a graphite sheet were evaluated depending on the pretreatment
methods which increase the nucleation density. Four kinds of pretreatments were studied including mechanical abrasion by
nano-diamond powders, ultrasonication of graphite in solvents with nano-diamond powder suspension, electrophoretic
deposition, and pretreatment with polyethyleneimine (PEI) to change the surface polarity, allowing the adsorption of
negatively charged diamond particles onto the substrate surface. Electrophoresis and PEI pretreatment methods were found
to be favorable of the diamond deposition to the graphite sheet. The serial process of the PEI-pretreatment and immersion
into acetone solution of diamond nano-powders was concluded as an optimal condition, resulting in 100% film coverage of
diamond film with the average grain size of 0.7-0.8 µm on the graphite sheet. It can be suggested that the diamond film
deposited on graphite could replace current SiC deposited graphite carrier in MOCVD process.
Relation: 13 pp.82-88
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/50276
Appears in Collections:[機械與機電工程學系] 期刊論文

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