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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/48201

Title: X-ray photoelectron spectroscopy and transmission electron microscopy study of internally oxidized Nb–Ru coatings
Authors: Yung-I Chen
Sin-Min Chen
Li-Chun Chang
Hsiu-Nuan Chu
Contributors: 國立臺灣海洋大學:光電與材料科技學系
Keywords: Internal
oxidation
Nb–Ru
Sputtering
TEM
XPS
Date: 2013-10
Issue Date: 2018-08-16T02:39:45Z
Publisher: Thin Solid Films
Abstract: Abstract: This study investigates the internal oxidation of Nb–Ru multilayer coatings with a cyclically gradient chemical concentration distribution along the growth direction after annealing in a 1% O2–Ar atmosphere at 600 °C for 1 h. X-ray photoelectron spectroscopy and transmission electron microscopy were used to analyze the oxidation behavior of Nb–Ru coatings. The results show that Nb oxidized preferentially in a Nb–Ru coating and partial Nb atoms oxidized to Nb5 +, Nb4 +, and Nb2 +, but Ru remained in a metallic state. After annealing, the microstructure evolved to a laminated structure consisting of alternative crystalline Nb2O5 and Ru layers.
Relation: 544 pp.491-495
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/48201
Appears in Collections:[光電科學研究所] 期刊論文

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