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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/48188

Title: Internal oxidation of laminated Hf–Ru coatings
Authors: Yung-I Chen
Yu-Ren Huang
Li-Chun Chang
Contributors: 國立臺灣海洋大學:光電與材料科技學系
Date: 2016-03
Issue Date: 2018-08-15T08:38:53Z
Publisher: Journal of Vacuum Science & Technology A
Abstract: Abstract: This study explored the internal oxidation of laminated Hf–Ru coatings by using cyclical gradient chemical concentration distribution along the growth direction. Hf-rich, near-equiatomic, and Ru-rich Hf–Ru coatings were prepared using direct-current magnetron cosputtering. Oxidation was examined by annealing the coatings at 500 and 600 °C in a 1% O2–99% Ar atmosphere for 30 min. The results indicated that internally oxidized laminated Hf–Ru coatings formed after annealing at 600 °C. Hf preferentially oxidized and formed monoclinic HfO2. The Ru-rich Hf0.11Ru0.89 coatings exhibited a higher oxidation resistance and superior mechanical properties.
Relation: 34(2)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/48188
Appears in Collections:[光電科學研究所] 期刊論文

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