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题名: Thermal stability of Ru–Al multilayered thin films on Inconel 617
作者: Yung-I Chen
Zhi-Ting Zheng
Jia-Wei Jhang
贡献者: 國立臺灣海洋大學:光電與材料科技學系
关键词: multilayer
thermal stability
日期: 2018-07
上传时间: 2018-08-15T07:30:58Z
出版者: Metals
摘要: Abstract: Ru-riched and equiatomic Ru–Al multilayered thin films were fabricated on Si and Inconel 617 substrates. These thin films exhibited a multilayered structure that is caused by stacking cyclical gradient concentration through cosputtering. X-ray diffraction analysis indicated that the as-deposited Ru–Al multilayers comprised Ru and RuAl phases. Oxidation that is caused by annealing atmospheres and elements diffused from substrates was investigated. The results indicated that the inward diffusion of O at 600 °C in a 1% O2–99% Ar atmosphere was restricted by the formation of an amorphous Al-oxide sublayer, and inward diffusion of O at 800 °C in air was limited by the formation of a crystalline Al2O3 scale. Additionally, the outward diffusion of elements from Inconel 617 penetrated the unoxidized parts of the 800 °C–annealed Ru–Al multilayers.
關聯: 8(7)
显示于类别:[光電科學研究所] 期刊論文


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