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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47435

Title: Optical nanometrology of Au nanoparticles on a multilayer film
Authors: Young Dong Kim
Yia-Chung Chang
Shih-Hsin Hsu
Pei-Kuen Wei
Contributors: 國立臺灣海洋大學:光電科學研究所
Date: 2008-03
Issue Date: 2018-07-23T02:20:24Z
Publisher: Biomedical Optics Express
Abstract: Abstract: Ellipsometric measurements coupled with efficient theoretical modeling are used to determine the size and distribution density of Au nanoparticles on a multilayer film. The rigorous coupled‐wave analysis (RCWA) and finiteelement Green's function method were used to model the polarization‐dependent reflectivity, and the model calculations are in reasonable agreement with the measurements. This demonstrates that the spectroscopic ellipsometry could be a useful optical tool for nondestructive nanometrology. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Relation: 5(5) pp.1194-1197
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47435
Appears in Collections:[光電科學研究所] 期刊論文

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