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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47424

Title: Optical metrology of randomly-distributed Au colloids on a multilayer film
Authors: Y D Kim
Chi-Shin Hsu
Yia-Chung Chang
Yi-Chun Chen
Pei-Kuen Wei
Contributors: 國立臺灣海洋大學:光電科學研究所
Date: 2010-01
Issue Date: 2018-07-18T07:47:03Z
Publisher: Optics Express
Abstract: Abstract: Spectroscopic ellipsometry (SE) measurements coupled with efficient theoretical modeling and scanning electron microscopy analysis are used in the metrology of randomly-distributed gold nanoparticles on a multilayer film. Measurements were conducted in the ultraviolet to near infrared region at several angles of incidence. To understand the size, shape, and distribution of nanoparticles, a finite-element Green's function approach considering the scattering from multiple nanoparticles was employed to calculate the ellipsometry parameters. Our calculations are in fair agreement with the ellipsometry measurements when suitable size, shape, and distribution pattern of nanoparticles are found. This demonstrates that SE could be a useful tool to the metrology of arbitrarily-distributed nanoparticles on a multilayer film.
Relation: 18(2)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47424
Appears in Collections:[光電科學研究所] 期刊論文

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