Abstract: A transparent electrode consists of nanoporous silver thin film and molybdenum oxide was developed for transparent anode with advantages of low cost, large-area processing and room-temperature fabrication. High density nanoporous silver film was fabricated by controlling thickness and deposition rate during thermal evaporation. With silver thickness of 10 nm and 5 Å/s deposition rate, the MoOx/nanoporous Ag/MoOx multilayer structure achieved ~9 Ω/sq sheet resistance and ~70% transparency. Compared to the indium—tin-oxide (ITO) anode, the nanoporous anode/SubPc/C60/BCP/Al photovoltaic device has an enhanced surface-plasmon absorption and a higher fill factor. Although its transparency is lower than ITO, the nanoporous anode achieved 3.45% power conversion efficiency, comparable to ITO-based devices.