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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47265

Title: Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm
Authors: G. Margaritondo
Tsung-Yu Chen
Yu-Tung Chen
Cheng-Liang Wang
Ivan M. Kempson
Wah-Keat Lee
Yong S. Chu
Y. Hwu
Contributors: 國立臺灣海洋大學:光電科學研究所
Date: 2011-10
Issue Date: 2018-07-09T07:32:33Z
Abstract: Abstract: Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.
Relation: 19(21) pp.19919-19924
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47265
Appears in Collections:[光電科學研究所] 期刊論文

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