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Title: Design and characterization of a compact nano-positioning system for a portable transmission x-ray microscope
Authors: Yeukuang Hwu
En-Te Hwu
Evgeny Nazaretski
Yong S. Chu
Huang-Han Chen
Yu-Sheng Chen
Weihe Xu
Contributors: 國立臺灣海洋大學:光電科學研究所
Date: 2013-12
Issue Date: 2018-07-05T08:48:22Z
Abstract: Abstract: We have designed and constructed a compact nano-positioning system for a Portable Transmission X-ray Microscope (PTXM). We introduce a concept of PTXM and adopt modular approach which implements identical nano-motion platforms to perform manipulation of PTXM components. Modular design provides higher stiffness of the system and allows for reduction of relative thermal drifts between individual constituents of the PTXM apparatus, ensuring a high degree of stability for nanoscale x-ray imaging. We have measured relative thermal drifts between two identical modules to be as low as 15 nm/h, sufficient to perform nanoscale imaging by TXM. Spatial resolution achieved by developed linear piezo stages was measured to be 3 nm with repeatability of 20 nm over 1 mm travel range.
Relation: 84(12)
Appears in Collections:[Institute of Optoelectronic Sciences] Periodical Articles

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