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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47230

Title: Design and performance of a scanning ptychography microscope
Authors: E. Nazaretski,
X. Huang
H. Yan
K. Lauer
R. Conley
N. Bouet
J. Zhou
W. Xu
D. Eom
D. Legnini
R. Harder
C.-H. Lin
Y.-S. Chen
Y. Hwu
Y. S. Chu
Contributors: 國立臺灣海洋大學:光電科學研究所
Date: 2014-03
Issue Date: 2018-07-05T08:10:46Z
Abstract: Abstract: We have designed and constructed a dedicated instrument to perform ptychography measurements and characterization of multilayer Laue lenses nanofocusing optics. The design of the scanning microscope provides stability of components and minimal thermal drifts, requirements for nanometer scale spatial resolution measurements. We performed thorough laboratory characterization of the instrument in terms of resolution and thermal drifts with subsequent measurements at a synchrotron. We have successfully acquired and reconstructed ptychography data yielding 11 nm line focus.
Relation: 85(3)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47230
Appears in Collections:[光電科學研究所] 期刊論文

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