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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47216

Title: X-ray-induced Cu deposition and patterning on insulators at room temperature
Authors: Eng Soon Tok
Pei-Cheng Hsu
Edwin B. L. Ong
Chang-Hai Wang
Y. Hwu
J. H. Je
G. Margaritondo
Contributors: 國立臺灣海洋大學:光電科學研究所
Keywords: micro-patterning
X-ray synthesis
copper seed layer
electroless plating
Date: 2015-09
Issue Date: 2018-07-05T06:00:56Z
Publisher: Journal of Synchrotron Radiation
Abstract: Abstract: X-ray irradiation is shown to trigger the deposition of Cu from solution, at room temperature, on a wide variety of insulating substrates: glass, passivated Si, TiN/Ti/SiO2/Si and photoresists like PMMA and SU-8. The process is suitable for patterning and the products can be used as seeds for electroplating of thicker overlayers.
Relation: 22(6)
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47216
Appears in Collections:[光電科學研究所] 期刊論文

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