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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47190

Title: Mechanical and structural properties of Permalloy films on glass and/or Si(111) substrates
Authors: S. U. Jen
Y. T. Chen
N. T. Yang
W. C. Cheng
Contributors: 國立臺灣海洋大學:光電科學研究所
Date: 2008-08
Issue Date: 2018-07-04T07:32:30Z
Publisher: Appl. Phys. A
Abstract: Abstract: Permalloy (Py) films were deposited on Si(111) or Corning 0211 glass substrates. There were two deposition temperatures: T s=room temperature (RT) and T s=270°C. The film thickness (t f) ranges from 10 to 130 nm. The crystal structure properties of the films were studied by X-ray diffraction and transmission electron microscopy. Mechanical properties (including Young’s modulus E f and hardness H f) of each film were measured by the nanoindentation (NI) technique. E f of the Py/Si(111) films was checked again by the laser induced surface acoustic wave (LA-SAW) technique. It was found that the NI technique is best suited for the measurements of E f and H f, but only when the sample belongs to the (soft film)/(soft substrate) system, such as the Py/glass film. For the (soft film)/(hard substrate) system, such as the Py/Si(111) film, the NI technique often provides higher values of E f and H f than expected. The anomalous phenomenon, associated with the NI technique may be related to the anisotropic crystal structures in the Py films on different kinds of substrates. From this study, we conclude that [E f of Py/Si(111)]>[E f of Py/glass] and [H f of Py/Si(111)]>[H f of Py/glass]. The good mechanical properties of the Py/Si(111) film make it a better candidate for recording head applications.
Relation: 94(2) pp.431–436
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/47190
Appears in Collections:[光電科學研究所] 期刊論文

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