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|Title: ||Mechanical Properties of Fluorinated DLC and Si Interlayer on a Ti Biomedical Alloy|
|Authors: ||Chau-Chang Chou;Yi-Yang Wu;Jyh-Wei Lee;Jen-Ching Huang;Chi-Hsiao Yeh|
|Keywords: ||Fluorinated diamond-like carbon;Titanium alloy;PECVD;Mechanical property;Adhesion|
|Issue Date: ||2017-04-07
|Publisher: ||Thin Solid Films|
|Abstract: ||Abstract:Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH4) and tetrafluoromethane (CF4) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.|
|Relation: ||528, pp.136-142|
|Appears in Collections:||[機械與機電工程學系] 期刊論文|
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