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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/41375

Title: Capacitive micromachined ultrasonic focusing device for ultrasound applications
Authors: Liu,Chia-Hung;Chen,Pei-Tai
Contributors: 國立臺灣海洋大學:系統工程暨造船學系
Keywords: constructive interference theory;capacitive micromachined ultrasonic focusing device;focal resolution;radiation pattern
Date: 2008-01
Issue Date: 2017-02-15T01:31:32Z
Publisher: Journal of the Chinese Institute of Engineers
Abstract: Abstract:This study applies constructive interference theory to investigate the behavior and performance of a capacitive micromachined ultrasonic focusing device (cMUFD). Via theory and numerical simulation this work demonstrates that this ultrasonic focusing device is superior to general acoustic devices in focal length and focal resolution of the constructive interference, especially in focal sound pressure (energy), which is five times that of a general acoustic device. The concentric rectangular cMUFD is microfabricated out of paper to measure radiation acoustic wave focal length and the radiation sound beam. Measurement results match the numerical theoretical calculations proving that use of the ultrasonic focusing device as an imaging device is feasible.
Relation: 32(1),pp.75-84
URI: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/41375
Appears in Collections:[系統工程暨造船學系] 期刊論文

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