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Title: Non-contact resistance measurement of transparent electrodes deposited on flexible display substrates under repetitive bending test by terahertz time domain spectroscopy
Authors: Bor-Jiunn Wen;Tze-An Liu;Hsing-Cheng Yu;Shih-Fang Chen;Yuh-Chuan Cheng
Contributors: 國立臺灣海洋大學:機械與機電工學系
Keywords: Non-contact resistance measurement;Bending test;Terahertz time domain spectroscopy;Four-point probe;Flexible characteristic inspection system
Date: 2016-12
Issue Date: 2017-02-14T03:14:35Z
Publisher: Displays
Abstract: Abstract:The objective of this study is to put forward a new non-contact resistance measurement method for repeating bending tests of transparent electrodes deposited on flexible display substrates. The study utilizes a terahertz time domain spectroscopy (THz-TDS) method to measure electrical properties of flexible polyethylene terephthalate/indium tin oxide samples up to 20,000 bending times. In addition, this study utilizes THz-TDS method to measure electrical characteristics of flexible substrates with hard-coat films. Accordingly, the percentage errors of measured sheet resistances based on THz-TDS method are less than or equal to 5.5% for comparison with a contact type four-point probe method or our previously reported flexible characteristic inspection system method. The values show a reasonable agreement with contact-mode sheet resistance measurements. Therefore, the electrical properties of thin films are measured offline or online easily by using this method.
Appears in Collections:[Department of Mechanical and Mechatronic Engineering] Periodical Articles

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