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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/34230

Title: Mechanical Properties of Fluorinated DLC and Si Interlayer on a Ti Biomedical Alloy
Authors: Chou;C.-C.*;Wu;Y.-Y.;Lee;J.-W.;Huang;J.-C.;Yeh;C.-H.
Contributors: NTOU:Department of Mechanical and Mechatronic Engineering
Keywords: Fluorinated diamond-like carbon;Titanium alloy;PECVD;Mechanical property;Adhesion
Date: 2013-01
Issue Date: 2013-10-07T02:07:55Z
Publisher: Thin Solid Films
Abstract: Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH4) and tetrafluoromethane (CF4) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.
Relation: 528, pp.136-142
URI: http://ntour.ntou.edu.tw/handle/987654321/34230
Appears in Collections:[機械與機電工程學系] 期刊論文

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