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Title: Mechanical Properties of Fluorinated DLC and Si Interlayer on a Ti Biomedical Alloy
Authors: Chou;C. C.*;Wu;Y.-Y.;Lee;J.-W.;Huang;J.-C.;Yeh;C.-H.
Contributors: NTOU:Department of Mechanical and Mechatronic Engineering
Keywords: Fluorinated diamond-like carbon;Titanium alloy;PECVD;Mechanical property;Adhesion
Date: 2012-04
Issue Date: 2013-10-03T03:14:22Z
Publisher: the 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2012), April 23th~27th , Town and County Hotel, San Diego, California, USA
Abstract: Fluorinated amorphous diamond-like carbon (F-DLC) films were deposited on Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) technique using a mixture of methane (CH4) and tetrafluoromethane (CF4) gasses. A 100 nm Si interlayer was coated in advance by physical vapor deposition (PVD) process to improve the adhesion between F-DLC and Ti alloy. The structure and surface properties of F-DLC coatings, prepared by various fluorine flow ratios, were investigated by using X-ray diffraction spectroscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. The mechanical properties were evaluated by nano-indentation, and the adhesion, by micro-scratch. The results showed that a moderate incorporation of the fluorine content in the DLC films can still maintain acceptable mechanical properties, which, on the other hand, obtains remarkable benefits of blood compatibility and anti-corrosion.
Relation: 528, pp.136–142
Appears in Collections:[Department of Mechanical and Mechatronic Engineering] Lecture & Seminar

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