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|Title: ||Mesoporous carbon powder gas sensors for detection of carbon monoxide|
|Authors: ||Chih-Cheng Lu;Kuan-Hsun Liao;Jeff Tsung-Hui Tsai;Chueh-Yang Liu;Jih-Perng Leu|
|Keywords: ||Mesoporous carbon powder;Dielectrophoresis;Microhotplate;MEMS;Gas sensor|
|Issue Date: ||2013-04-08T02:47:16Z
|Publisher: ||Biomedical Engineering - Applications, Basis and Communications|
|Abstract: ||Abstract:This article reports a new class of silicon-based microgas sensors utilizing hexagonally-ordered mesoporous carbon powders (MCPs) as the sensitive film. The mesoporous carbon powders featuring high-specific surface area are replicated by the SBA-15 silica template and immobilized between Cr electrodes on a 9 × 9 cm silicon chip by using a.c. dielectrophoresis (DEP) process at room temperature. The silicon sensor platform comprises Cr microheaters embedded in a dielectric thin membrane manufactured by microelectromechanical systems back-etching techniques. It is shown that MCPs can be satisfactorily aligned along electric fields and accumulated to the electrode area. Investigations into CO detection are carried out to verify gas-sensitive characteristics of the MCP nanofilm. Our experimental results disclose the mesoporous carbon powders are successfully chemoresistive to CO, and demonstrate distinct resistance change with respect to ppm-level variation. In addition, response time, recovery time, and reproducible sensing behavior are experimentally obtained.|
|Relation: ||21(6), pp.399-404|
|Appears in Collections:||[光電科學研究所] 期刊論文|
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