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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/33311

Title: Height effect in mass transfer analysis of the sublimation of solid precursor for a CVD process
Authors: Guan‐Jr Tsai;Kan‐Sen Chou
Contributors: 國立臺灣海洋大學:食品科學系
Keywords: sample height;mass transfer analysis;CVD process
Date: 1995
Issue Date: 2013-01-02T02:49:58Z
Publisher: Journal of the Chinese Institute of Engineers
Abstract: Abstract:The dependency of the sublimation rate of Cu(thd)2 solid particles on the space height in the sample cell and under various gas velocities was investigated. Our results can be satisfactorily explained via a working model based on the combined effects of diffusion and convection. We also showed that due to the ever decreasing precursor quantity during a CVD process, its sublimation rate will decrease accordingly. Nevertheless, this decrease can be minimized and be made negligible by using a pelletized sample and placing this pellet in flush with the cell rim (i.e. zero space height).
Relation: 18(6), pp.771-776
URI: http://ntour.ntou.edu.tw/handle/987654321/33311
Appears in Collections:[食品科學系] 期刊論文

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