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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/32949

Title: The Fabrication of PbTiO3 Thin Film IR Sensors Using Microelectro-Mechanical System (MEMS) Technique
Authors: Chung Cheng Chang
Contributors: NTOU:Department of Electrical Engineering
Date: 2001
Issue Date: 2012-06-18T07:49:22Z
Publisher: 奈米工程暨微系統技術研討會/工研院
Abstract: This paper reviews deposition, integration, and device fabrication of ferroelectric PbZrxTi1−xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented.A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
URI: http://ntour.ntou.edu.tw/handle/987654321/32949
Appears in Collections:[電機工程學系] 演講及研討會

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