The pyroelectric infrared (PIR) sensor with a calcium-modified lead titanate Pb1xCaxTiO3 thin
film with x = 0.3 [PCT(30)] thin film have been successfully fabricated. A RF planar magnetron
sputter was used to deposit PCT(30) thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr = 25.3 c/cm2 and coercive electric field Ec = 52.65 KV/cm. The pyroelectric coefficient was measured as a function of temperature which was 4.13 104 C/m2 K at 300 degree C. For the PIR performance measurement, the voltage response of the single PIR sensor is 723.5 VW1 and the specific detectivity is 8.28 106 cmW1 at 0.3 Hz. In addition, a 2D 8 8 element PIR sensor array is finished with fabricated PIR sensors.