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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/32935

Title: The Characterization and Fabrication of Pyroelectric Infrared Image Sensor
Authors: Chung Cheng Chang
Contributors: NTOU:Department of Electrical Engineering
Keywords: Pb0.7Ca0.3TiO3 (PCT(30));Remanent Polarization;Coercive Electric Field;Pyroelectric Coefficient;Voltage Response;Specific Detectivity
Date: 2004
Issue Date: 2012-06-18T07:49:00Z
Publisher: 奈米工程暨微系統技術研討會
Abstract: The pyroelectric infrared (PIR) sensor with a calcium-modified lead titanate Pb1xCaxTiO3 thin
film with x = 0.3 [PCT(30)] thin film have been successfully fabricated. A RF planar magnetron
sputter was used to deposit PCT(30) thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr = 25.3 c/cm2 and coercive electric field Ec = 52.65 KV/cm. The pyroelectric coefficient was measured as a function of temperature which was 4.13 104 C/m2 K at 300 degree C. For the PIR performance measurement, the voltage response of the single PIR sensor is 723.5 VW1 and the specific detectivity is 8.28 106 cmW1 at 0.3 Hz. In addition, a 2D 8 8 element PIR sensor array is finished with fabricated PIR sensors.
URI: http://ntour.ntou.edu.tw/handle/987654321/32935
Appears in Collections:[電機工程學系] 演講及研討會

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