National Taiwan Ocean University Institutional Repository:Item 987654321/32919
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题名: Fabrication and Characterization of Integratedn pressure sensor
作者: Chung Cheng Chang
贡献者: NTOU:Department of Electrical Engineering
國立臺灣海洋大學:電機工程學系
关键词: Polydimethylsiloxane (PDMS);Polyethylene terephthalate (PET);Polymeric diaphragm pressure sensor;Strain gauge
日期: 2001
上传时间: 2012-06-18T07:48:35Z
出版者: Electron Devices and Materials Symposia Tainan
摘要: We demonstrated a simple fabrication of polymeric diaphragm pressure sensors by embedding a commercial thin-film strain gauge in a polymeric diaphragm. Two different polymer materials, polydimethylsiloxane (PDMS) and polyethylene terephthalate (PET), were employed for fabrication. Performance of pressure sensors fabricated with two different polymers including sensitivity, linearity, and long-term stability was thoroughly compared using a characterization setup operating in either compressed air or water. Pressure sensitivities were similar for air and water environments regardless of the polymer material. However, the sensitivity and resolution of PET pressure sensors were about 2.5 times better than those of PDMS pressure sensors. Moreover, significant degradation of PDMS pressure sensors was observed over time while PET pressure sensors exhibited good stability in water. Overall, PET is better suited for making liquid pressure sensors than PDMS.
URI: http://ntour.ntou.edu.tw/handle/987654321/32919
显示于类别:[電機工程學系] 演講及研討會

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