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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/28792

Title: Study and Fabrication of the PbTiO3 Thin Film Acoustic Sensors
Authors: C.C. Chang;W.J. Lin
Contributors: NTOU:Department of Electrical Engineering
國立臺灣海洋大學:電機工程學系
Keywords: Acoustic sensors;PbTiO3;Piezoelectric;Receiving sensitivity;Thin film;Transmitting intensity
Date: 2000-01
Issue Date: 2011-10-21T02:40:35Z
Publisher: Ultrasonics
Abstract: abstract:In this study, thin film acoustic sensors were fabricated utilizing the r.f. planar magnetron sputtering method and micromachining techniques. Underwater testing results indicated that the maximum receiving sensitivity of −117.8 dBV μbar−1 occurred at 5.5 MHz. For the acoustic sensors tested, the highest transmitting intensities were 26.5 dBV/μbar at a fundamental resonant frequency of 7 MHz, 40.4 dBV μbar−1 at the third harmonic of 21 MHz, and 37.1 dBV μbar−1 at half the fundamental frequency or 3.5 MHz. Underwater measurements also indicated that the larger the sample area, the higher the transmitting intensity and receiving sensitivity.
Relation: 37(8), pp.585-588
URI: http://ntour.ntou.edu.tw/handle/987654321/28792
Appears in Collections:[電機工程學系] 期刊論文

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