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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/28652

Title: The Characterization and Fabrication of Pyroelectric Infrared Sensor
Authors: C. C. Chang;K. P. Chu;Y. C. Lai
Contributors: 國立臺灣海洋大學:電機工程學系
Keywords: Pb0.7Ca0.3TiO3 (PCT(30));Remanent Polarization;Coercive Electric Field;Pyroelectric Coefficient;Voltage Response;Specific Detectivity
Date: 2005
Issue Date: 2011-10-21T02:38:51Z
Publisher: TamKang Journal of Science and Engineering
Abstract: Abstract:The pyroelectric infrared (PIR) sensor with a calcium-modified lead titanate Pb1xCaxTiO3 thin film with x = 0.3 [PCT(30)] thin film have been successfully fabricated. A RF planar magnetron sputter was used to deposit PCT(30) thin film. A perovskite thin film can be obtained. From the properties measurement we can obtain the remanent polarization Pr = 25.3 c/cm2 and coercive electric field Ec = 52.65 KV/cm. The pyroelectric coefficient was measured as a function of temperature which was 4.13  104 C/m2 K at 300 degree C. For the PIR performance measurement, the voltage response of the single PIR sensor is 723.5 VW1 and the specific detectivity is 8.28  106 cmW1 at 0.3 Hz. In addition, a 2D 8  8 element PIR sensor array is finished with fabricated PIR sensors.
Relation: 8(3), pp.203-206
URI: http://ntour.ntou.edu.tw/handle/987654321/28652
Appears in Collections:[電機工程學系] 期刊論文

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