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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/28636

Title: Synthesis of IrO2 nanocrystals on sapphire via metal-organic chemical vapor deposition
Authors: P.C. Liao;A. Korotcov;C.W. Huang;Y.S. Huang;D.S. Tsai;K.K. Tiong
Contributors: NTOU:Department of Electrical Engineering
Keywords: Oxide materials;Metal-organic chemical vapor deposition;Scanning electron microscopy;X-ray diffraction
Date: 2007-09-13
Issue Date: 2011-10-21T02:38:42Z
Publisher: Journal of Alloys and Compounds
Abstract: Abstracr:We report the results of the synthesis of IrO2 nanocrystals (NCs) on sapphire (SA) substrates with different orientations via metal-organic chemical vapor deposition (MOCVD) using (MeCp)(COD)Ir as the source reagent. The surface morphology and structural properties of the as-deposited NCs were characterized using field emission scanning electron microscopy (FESEM), and X-ray diffractometry (XRD). FESEM micrographs reveal that vertically aligned NCs were grown on SA(1 0 0), the NCs on SA(0 1 2) and SA(1 1 0) contained, respectively, single- and double-aligned directions with a tilt angle of 35° from the normal to the substrates, while NCs parallel in-plane alignment were gown on SA(0 0 1). The XRD results indicate that the IrO2 NCs are (0 0 1), (1 0 1), and (1 0 0) oriented on SA(1 0 0), SA(0 1 2)/SA(1 1 0) and SA(0 0 1) substrates, respectively. A strong substrate effect on the alignment of the IrO2 NCs growth has been demonstrated and the probable mechanism for the formation of the NCs is discussed.
Relation: 442(1-2),pp. 313-315
URI: http://ntour.ntou.edu.tw/handle/987654321/28636
Appears in Collections:[電機工程學系] 期刊論文

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