Second International Conference on Optical, Optoelectronic and Photonic Materials and Applications 2007
Raman spectroscopy (RS) was used to study the phase transformations of nanocrytalline TiO2 thin films. The films were grown by a vertical-flow cold-wall metal organic chemical vapour deposition system, using Ti(C10H14O5) as the source reagent, at different substrate temperatures. The results indicate that the anatase phase is present at around 550 °C and the rutile phase starts to form at 620 °C. The anatase phase completely transforms into the rutile phase at 680 °C. We have demonstrated that RS can be used as a powerful nondestructive technique for a quick and efficient determination of the phase of TiO2 thin films.