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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/28570

Title: Raman spectroscopy study of the phase transformation on nanocrystalline titania films prepared via metal organic vapour deposition
Authors: C. A. Chen;Y. S. Huang;W. H. Chung;D. S. Tsai;K. K. Tiong
Contributors: NTOU:Department of Electrical Engineering
Date: 2007
Issue Date: 2011-10-21T02:38:11Z
Publisher: Second International Conference on Optical, Optoelectronic and Photonic Materials and Applications 2007
Abstract: Raman spectroscopy (RS) was used to study the phase transformations of nanocrytalline TiO2 thin films. The films were grown by a vertical-flow cold-wall metal organic chemical vapour deposition system, using Ti(C10H14O5) as the source reagent, at different substrate temperatures. The results indicate that the anatase phase is present at around 550 °C and the rutile phase starts to form at 620 °C. The anatase phase completely transforms into the rutile phase at 680 °C. We have demonstrated that RS can be used as a powerful nondestructive technique for a quick and efficient determination of the phase of TiO2 thin films.
Relation: 2007, pp.P020
URI: http://ntour.ntou.edu.tw/handle/987654321/28570
Appears in Collections:[電機工程學系] 演講及研討會

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