Journal of Materials Science: Materials in Electronics
Abstract:Raman spectroscopy (RS) was used to study the phase transformations of nanocrytalline TiO2 thin films. The films were grown by a vertical-flow cold-wall metal organic chemical vapour deposition system, using Ti(C10H14O5) as the source reagent, at different substrate temperatures. The results indicate that the anatase phase is present at around 550 °C and the rutile phase starts to form at 620 °C. The anatase phase completely transforms into the rutile phase at 680 °C. We have demonstrated that RS can be used as a powerful nondestructive technique for a quick and efficient determination of the phase of TiO2 thin films.