Proceedings of 2005 5th IEEE Conference on Nanotechnology Nagoya, Japan, July 2005
Abstract:We report the preparation of 1D vertically aligned IrO2 nanocrystals on LiNbO3 (100) substrates by reactive magnetron sputtering with Ir metal target. The effects of sputtering conditions such as pressure, rf power, substrate temperature etc. have been presented and discussed. The surface morphology, structural and spectroscopic properties of the as-grown nanocrystals have been characterized using field-emission scanning electron microscopy (FESEM), X-ray diffractometry (XRD) and micro-Raman scattering. The red-shift and asymmetric broadening of Raman lineshape have been analyzed and attributed to both the size effect and residual stress.