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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/28453

Title: Deposition and characterization of 1-D RuO2 nanocrystals by reactive sputtering
Authors: A. Korotcov;H.P. Hsu;Y.S. Huang;P.C. Liao;D.S. Tsai;K.K. Tiong
Contributors: NTOU:Department of Electrical Engineering
Keywords: Oxide materials;Reactive sputtering;Scanning electron microscopy;Raman scattering;X-ray diffraction
Date: 2006
Issue Date: 2011-10-21T02:37:37Z
Publisher: 15th International Conference on Solid Compounds of Transition Elements
Abstract: Well-aligned 1D RuO2 nanocrystals (NCs) have been grown on sapphire (SA)(1 0 0), SA(0 0 1) and LiNbO3 (LNO)(1 0 0) substrates via reactive magnetron sputtering using a Ru metal target. The surface morphology, structural and spectroscopic properties of the as-deposited NCs are characterized using field-emission scanning electron microscopy (FESEM), X-ray diffraction (XRD), and micro-Raman spectroscopy (RS). FESEM micrographs show that NCs grown on SA(1 0 0)/LNO(1 0 0) are vertically aligned, while NCs grown on SA(0 0 1) show in-plane alignment with mosaic structure. The XRD results indicate that the NCs are (0 0 1) and (1 0 0) oriented on SA(1 0 0)/LNO(1 0 0) and SA(0 0 1) substrates, respectively. A strong substrate effect on the alignment of the RuO2 NCs deposition has been observed and the probable mechanism for the formation of these NCs has been discussed. The usefulness of the Raman spectroscopy as a structural characterization technique of NCs has been demonstrated.
URI: http://ntour.ntou.edu.tw/handle/987654321/28453
Appears in Collections:[電機工程學系] 演講及研討會

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