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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/27731

Title: Generally Applicable Self-masking Technique for Nanotips Array Fabrication
Authors: Kuei-Hsien Chen;Chih-Hsun Hsu;Hung-Chun Lo;Surojit Chattopadhyay;Chien Ting Wu;Jih-Shang Hwang;Debajyoti Das;Li-Chyong Chen
Contributors: NTOU:Institute of Optoelectronic Sciences
Keywords: Nanotip;Field Emission;Surface Enhanced Raman Spectroscopy
Date: 2004-09
Issue Date: 2011-10-21T02:33:15Z
Publisher: Tamkang Journal of Science and Engineering
Abstract: Abstract:Well-aligned nanotip arrays were fabricated via a self-masking dry etching technique in an electron cyclotron resonance (ECR) plasma process. Nanotip arrays of Si, poly silicon, GaN, GaP, sapphire, and Al were fabricated. Simultaneous etching of the substrate and formation of silicon carbide (SiC) protecting caps are attributed to the nanotip formation. The ultra-low turn on filed for electron field emission as well as the surface enhanced Raman Spectroscopic study of Si nanotips is also demonstrated.
Relation: 7(3), pp.129-134
URI: http://ntour.ntou.edu.tw/handle/987654321/27731
Appears in Collections:[光電科學研究所] 期刊論文

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