English  |  正體中文  |  简体中文  |  Items with full text/Total items : 26988/38789
Visitors : 2318278      Online Users : 31
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search
LoginUploadHelpAboutAdminister

Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/27505

Title: On the characteristics of AlGaN films grown on (111) and (001) Si substrates
Authors: Cheng-Liang Wang;Jyh-Rong Gong;Wei-Tsai Liao;Wei-Lin Wang;Tai-Yuan Lin;Chung-Kwei Lin
Contributors: NTOU:Institute of Optoelectronic Sciences
國立臺灣海洋大學:光電科學研究所
Keywords: A. AlGaN/Si;B. OMVPE;D. OM and TEM;D. Photoluminescence
Date: 2006-01
Issue Date: 2011-10-21T02:32:00Z
Publisher: Solid State Communications
Abstract: Abstract:High Al-content AlxGa1−xN films were deposited on (001) and (111) Si substrates at 1000 °C using high temperature AlN buffer layers. Experimental results show that AlxGa1−xN films grown on (111) Si substrates exhibit better crystalline quality than that in the films deposited on (001) Si substrates. Cracks were found in the high Al-content AlxGa1−xN/(111) Si samples but they were not observed in the AlxGa1−xN films grown on (001) Si substrates having the same film thicknesses and Al compositions. Based upon the results of X-ray diffraction (XRD) and transmission electron microscopy (TEM), it appears that mono-crystalline AlxGa1−xN films were achieved on (111) Si substrates while columnar structure was observed in the AlxGa1−xN/(001) Si samples. According to the depth profiles of AlxGa1−xN/Si samples using secondary ion mass spectroscopic (SIMS) analyses, enhanced Al inter-diffusion in the AlxGa1−xN/(001) Si samples was identified. Room temperature (RT) photoluminescence (PL) measurements of the AlxGa1−xN (x≦0.10)/(111) Si samples exhibit strong near band edge luminescence. The PL emission linewidth was found to decrease with the decrement of Al-content.
PACS
81.05.Ea;81.15.Gh;78.55.Cr;61.10.Nz
Relation: 137(1-2), pp.63-66
URI: http://ntour.ntou.edu.tw/handle/987654321/27505
Appears in Collections:[光電科學研究所] 期刊論文

Files in This Item:

There are no files associated with this item.



All items in NTOUR are protected by copyright, with all rights reserved.

 


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback