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题名: Demonstrating Applications of Non-optically Regulated Tapping-Mode Near-Field Scanning Optical Microscopy to Nano-optical Metrology and Optical Characterization of Semiconductors
作者: Nien Hua Lu;Shuen De Chang;Guan-Bin Huang;Hung Ji Huang;Ying Sheng Huang;Hai-Pang Chiang;Din Ping Tsai
贡献者: NTOU:Institute of Optoelectronic Sciences
日期: 2006-03-31
上传时间: 2011-10-21T02:31:50Z
出版者: Japanese Journal of Applied Physics
摘要: Abstract:We demonstrate the applications of a near-field scanning optical microscopy (NSOM) system based on a short-probe tapping-mode tuning fork (TMTF) configuration to nano-optical metrology and the optical characterization of semiconductors. The short-probe TMTF–NSOM system is constructed to operate in both collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as a light collector/emitter as well as a force-sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged in the collection mode. Excitation-mode short-probe TMTF–NSOM is applied to near-field surface photovoltage measurement on distributed-Bragg-reflector-enhanced absorbing substrate AlGaInP light-emitting diode structures.
關聯: 45(3B), pp.2187-2192
显示于类别:[光電科學研究所] 期刊論文


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