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Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/24471

Title: Opto-Mechatronic Configurations to Maximize Dynamic Range and Optimize Resolution of Optical Instruments
Authors: Chih-Kung Lee;Tsung-Dar Cheng;Shu-Sheng Lee;Chin-Kai Chang
Contributors: NTOU:Department of Systems Engineering and Naval Architecture
Keywords: interferometry;metrology;optical systems;ESPI;Doppler interferometer;AVID
Date: 2009-03-01
Issue Date: 2011-10-20T08:12:26Z
Abstract: Abstract:We developed a new mechanical configuration which combines various optical techniques to maximize dynamic range and to optimize resolution in optical instruments. We assessed various optical configurations by looking at such variables as electronic signal processing and mechanical construction. Previous configurations developed over the last 10 years are discussed. In our new configuration, we adopted and integrated devices such as a microscopic, an interferometer, an electronic speckle pattern interferometer, and a photon tunneling microscope. We examined the impact of our new configuration on future opto-mechatronic systems design. Our new configuration can be an effective and versatile optical metrology tool for enhancing the performance of MEMS and NEMS devices.
Relation: 16(2), pp.133-140
URI: http://ntour.ntou.edu.tw/handle/987654321/24471
Appears in Collections:[系統工程暨造船學系] 期刊論文

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