National Taiwan Ocean University Institutional Repository:Item 987654321/24390
English  |  正體中文  |  简体中文  |  Items with full text/Total items : 28588/40619
Visitors : 4189860      Online Users : 43
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item:

Title: Computational study of the effect of finger width and aspect ratios for the electrostatic levitating force of MEMS combdrive
Authors: Yunn-Shiuan Liao;Jeng-Tzong Chen
Contributors: NTOU:Department of Harbor and River Engineering
Keywords: Aspect ratio;DBEM;MEMS;combdrive;finger width ratio;levitating force
Date: 2005-04
Issue Date: 2011-10-20T08:12:03Z
Publisher: Journal of Microelectromechanical Systems
Abstract: Abstract:Since the width ratio between movable and fixed fingers, and the aspect ratio between the height and width of fingers, can play very important roles for combdrive levitation control, computational study of variations in those parameters for electrostatic levitating force acting on the movable finger is indispensable for MEMS performance. For diverse finger width and aspect ratios of MEMS combdrive design, the BEM has become a better method than the domain-type FEM because BEM can provide a complete solution in terms of boundary values only, with substantial saving in modeling effort. DBEM still has some advantages over conventional BEM for singularity, so the DBEM was used to simulate the fringing of field around the edges of the fixed finger and movable finger of MEMS combdrive for diverse finger width and aspect ratios. Results show that the less the finger width ratio is, the larger the levitating force acting is. Furthermore, the levitating force becomes more dominant as the aspect ratio increases, but it will be kept constant while the aspect ratio becomes larger.
Relation: 14(2), pp.305-312
Appears in Collections:[Department of Harbor and River Engineering] Periodical Articles

Files in This Item:

File Description SizeFormat

All items in NTOUR are protected by copyright, with all rights reserved.


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback