English  |  正體中文  |  简体中文  |  Items with full text/Total items : 28608/40649
Visitors : 6455563      Online Users : 83
RC Version 4.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item: http://ntour.ntou.edu.tw:8080/ir/handle/987654321/24387

Title: Numerical studies of variations in the gap and finger width ratio and travelled distance for the driving force of a radio-frequency microelectromechanical system device using the dual boundary element method
Authors: Y-S Liao;S-W Chyuan;J-T Chen
Contributors: NTOU:Department of Harbor and River Engineering
Keywords: microelectromechanical systems (MEMSs);electrostatic;dual boundary element method (DBEM);comb-drive;driving force;gap;finger width ratio
Date: 2004
Issue Date: 2011-10-20T08:12:01Z
Publisher: Proceedings of the I MECH E Part C Journal of mechanical Science
Abstract: abstract:For the comb-drive design of microelectromechanical systems (MEMSs), the driving force due to the electrostatic field is very important, and an accurate electrostatic analysis is essential and indispensable. For various gaps, finger width ratios and travelled distances of the comb drive of MEMSs, the dual boundary element method (DBEM) has become a better method than the domaintype finite element method because the DBEM can provide a complete solution in terms of boundary values, with substantial saving in modelling effort. In this article, the DBEM is used to simulate the fringing field around the edges of the fixed and movable fingers of the comb drive of an MEMS for diverse design cases, and many electrostatic problems for typical comb drive designs of MEMSs are analysed, investigated and compared with a widely used approximate method. Results show that the driving force is obviously dependent on the travelled distance, and the approximate method cannot work well for all travelled positions because there is an apparent error (not less than 10 per cent), especially at the beginning and ends of the range of travel. In addition, the smaller the gap between movable and fixed fingers, the larger the driving force is, and the error of approximate method also becomes more and more predominant as the gap decreases. The results also demonstrate that the difference between the DBEM and the approximate method effect due to finger width ratio is very small. Using the DBEM presented in this article, an accurate and reasonable electrostatic field can be obtained, and the follow-up control method of driving force for the comb drive of an MEMS can be implemented more precisely.
Relation: 218(10), pp.1243-1253
URI: http://ntour.ntou.edu.tw/handle/987654321/24387
Appears in Collections:[河海工程學系] 期刊論文

Files in This Item:

File Description SizeFormat

All items in NTOUR are protected by copyright, with all rights reserved.


著作權政策宣告: 本網站之內容為國立臺灣海洋大學所收錄之機構典藏,無償提供學術研究與公眾教育等公益性使用,請合理使用本網站之內容,以尊重著作權人之權益。
網站維護: 海大圖資處 圖書系統組
DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback